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Dändliker, René

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Dändliker, René
Affiliation principale
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Ancien.ne collaborateur.trice
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https://libra.unine.ch/handle/123456789/34326

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  • Publication
    Accès libre
    Performance of an Integrated Microoptical System for Fluorescence Detection in Microfluidic Systems
    (2002)
    Roulet , Jean-Christophe
    ;
    Völkel, Reinhard
    ;
    Herzig, Hans-Peter 
    ;
    Verpoorte, Elisabeth
    ;
    de Rooij, Nicolaas F.
    ;
    Dändliker, René 
    This article presents a new integrated microfluidic/microoptic device designed for basic biochemical analysis. The microfluidic network is wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar microfluidic systems, elements of the detection system are realized with the help of microfabrication techniques and directly deposited on both sides of the microchemical chip. The detection system is composed of the combination of refractive circular or elliptical microlens arrays and chromium aperture arrays. The microfluidic channels are 60 μm wide and 25 μm deep. The elliptical microlenses have a major axis of 400 μm and a minor axis of 350 μm. The circular microlens diameters range from 280 μm to 350 μm. The apertures deposited on the outer chip surfaces are etched in a 3000-Å-thick chromium layer. The overall thickness of this microchemical system is <1.6 mm. A limit of detection of 3.3 nM for a Cy5 solution in phosphate buffer (pH 7.4) was demonstrated. The cross-talk signal measured between two adjacent microchannels with 1 mm pitch was <1:5600, meaning that ≤1.8 × 10-4% of the fluorescence light power emitted from one microchannel filled with a 50 μM Cy5 solution reaches the photodetector at the adjacent microchannel. This performance compares very well with that obtainable in microchemical chips using confocal fluorescence systems, taking differences in parameters, such as excitation power into microchannels, data acquisition rates, and signal filtering into account.
  • Publication
    Accès libre
    Microlens systems for fluorescence detection in chemical microsystems
    (2001)
    Roulet, Jean-Christophe
    ;
    Völkel, Reinhard
    ;
    Herzig, Hans-Peter 
    ;
    Verpoorte, Elisabeth
    ;
    de Rooij, Nicolaas F.
    ;
    Dändliker, René 
    Micro-optical systems based on refractive microlenses are investigated. These systems are integrated on a chemical chip. They focus an excitation beam into the detection volume (microliter or even submicroliter scale) and collect the emitted light from fluorescent molecules. The fluorescence must be carefully separated by spatial and spectral filtering from the excitation. This paper presents the ray tracing simulation, fabrication, and measurement of three illumination systems. The measurements show that an adroit placement and combination of microfabricated lenses and stops can increase the separation between the excitation light and the fluorescence light. Moreover we present the successful detection of a 20 nM Cy5TM (Amersham Life Science Ltd.) solution in a 100-µm-wide and 50-µm-deep microchannel (excitation volume ≈ 250 pL) using one of these illumination systems. The microchemical chip with the micro-optical system has a thickness of less than 2 mm.
  • Publication
    Accès libre
    Microsystems for Optical Imaging and Interconnects
    (2000)
    Dändliker, René 
    ;
    Herzig, Hans-Peter 
    ;
    Völkel, Reinhard
    We report on our activities in the design, fabrication, characterization and system integration of planar micro-optical elements. Microfabrication technologies like photolithography, resist processing and reactive ion etching (RIE) are used to manufacture arrays of refractive and diffractive micro-optical elements. Microlens arrays, gratings, beam shapers and beam-splitters have been fabricated, tested and integrated in chemical analysis systems (μTAS), multiple channel imaging systems for photolithography and micro-optic spectrometers.
  • Publication
    Accès libre
    Microlens lithography: A new approach for large display fabrication
    (1996)
    Völkel, Reinhard
    ;
    Herzig, Hans-Peter 
    ;
    Nussbaum, Philippe
    ;
    Singer, Wolfgang
    ;
    Dändliker, René 
    ;
    Hugle, William B.
    Microlens lithography is a new lithographic method, that uses microlens arrays to image a lithographic mask onto a substrate layer. Microlens lithography provides photolithography at a moderate resolution for an almost unlimited area. The imaging system consists of stacked microlens arrays forming an array of micro-objectives. Each micro-objective images a small part of the mask pattern, the images overlap in the image plane. Potential applications for microlens lithography are the fabrication of large area flat panel displays (FPD), color filters, and micromechanics.
  • Publication
    Accès libre
    Microlens array imaging system for photolithography
    (1996)
    Völkel, Reinhard
    ;
    Herzig, Hans-Peter 
    ;
    Nussbaum, Philippe
    ;
    Dändliker, René 
    ;
    Hugle, William B.
    A micro-optical system is proposed that uses a stack of four microlens arrays for 1:1 imaging of extended object planes. The system is based on the concept of multiple-aperture imaging. A compact system is presented that is remarkable in that it provides a diffraction-limited resolution of 3 µm for unlimited object and image areas. Resolution of 5 µm has been demonstrated for an area of 20 × 20 mm2 in an experimental setup using melting resist microlens arrays (190-µm lens diameter). The investigated imaging system was developed in connection with a new contactless photolithographic technique called microlens lithography. This new lithographic imaging technique provides an increased depth of focus (>50 µm) at a larger working distance (>1 mm) than with customary proximity printing. Potential applications are photolithography for large print areas (flat panel displays, color filters), for thick photoresist layers (micromechanics), on curved surfaces (or substrates with poor planarity), in V grooves, etc.
  • Publication
    Accès libre
    Non-conventional techniques for optical lithography
    (1995)
    Dändliker, René 
    ;
    Gray, S.
    ;
    Clube, Francis S. M.
    ;
    Herzig, Hans-Peter 
    ;
    Völkel, Reinhard