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Microsystems for Optical Imaging and Interconnects
Auteur(s)
Dändliker, René
Editeur(s)
Herzig, Hans-Peter
Völkel, Reinhard
Date de parution
2000
In
Unconventional Optical Elements for Information Storage, Processing and Communications, Springer, 2000/2/5/89-97
Résumé
We report on our activities in the design, fabrication, characterization and system integration of planar micro-optical elements. Microfabrication technologies like photolithography, resist processing and reactive ion etching (RIE) are used to manufacture arrays of refractive and diffractive micro-optical elements. Microlens arrays, gratings, beam shapers and beam-splitters have been fabricated, tested and integrated in chemical analysis systems (μTAS), multiple channel imaging systems for photolithography and micro-optic spectrometers.
Autre version
http://www.springer.com/east/home/new+&+forthcoming+titles+(default)?SGWID=5-40356-22-33591731-0
Type de publication
Resource Types::text::journal::journal article
