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Non-conventional techniques for optical lithography
Auteur(s)
Dändliker, René
Editeur(s)
Gray, S.
Clube, Francis S. M.
Herzig, Hans-Peter
Völkel, Reinhard
Date de parution
1995
In
Microelectronic Engineering, Elsevier, 1995/27/1-4/205-211
Autre version
http://dx.doi.org/10.1016/0167-9317(94)00090-H
Type de publication
Resource Types::text::journal::journal article
