Non-conventional techniques for optical lithography

Author(s)

Dändliker, René

Labo d'optique appliquée

Gray, S.

Clube, Francis S. M.

Herzig, Hans-Peter

Labo d'optique appliquée

Völkel, Reinhard

Date issued

1995

In

Microelectronic Engineering, Elsevier, 1995/27/1-4/205-211

Publication type

journal article

Identifiers

https://libra.unine.ch/handle/20.500.14713/64629

DOI

10.1016/0167-9317(94)00090-H

File(s)

Name

D_ndliker_Ren_-_Non-conventional_techniques_for_optical_lithography_20071218.pdf

Type

Main Article

Size

3.85 MB

Format

Adobe PDF