Microfabricated piezoelectric elastic force motors

Author(s)
Dellmann, Laurent
Editor(s)
Publisher
Neuchâtel : Université de Neuchâtel
Date issued
2000
Number of pages
134 p. CD-ROM + 3 manuscrits
Notes
Thèse de doctorat, Sciences, Microtechnique
Publication type
doctoral thesis
Identifiers
https://libra.unine.ch/handle/20.500.14713/32825
DOI
10.35662/unine-thesis-1525
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