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Surface micromachined electrostatic actuators

Auteur(s)
Jaecklin, Victor P.
Neuchâtel : Moser
Date Issued
1994
Number of pages
131 p.
Subjects
Notes
Thèse de doctorat, Sciences, Microtechnique
Identifiers
https://libra.unine.ch/handle/123456789/34039
_
10.35662/unine-thesis-1203
Publication type
doctoral thesis
File(s)