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Interferometric fabrication of modulated submicrometer gratings in photoresist
Auteur(s)
Ehbets, Peter
Nussbaum, Philippe
Blattner, Peter
Date de parution
1995
In
Applied Optics, Optical Society of America, 1995/34/14/2540-2547
Identifiants
Autre version
http://ao.osa.org/abstract.cfm?id=45389
Type de publication
journal article
