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Design, fabrication and testing of microlens arrays for sensors and microsystems
Auteur(s)
Nussbaum, Philippe
Völkel, R.
Herzig, Hans-Peter
Eisner, M.
Haselbeck, S.
Date de parution
1997
In
Pure and Applied Optics: Journal of the European Optical Society Part A, Institute of Physics (IOP), 1997/6/6/617-636
Résumé
We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.
Identifiants
Type de publication
journal article
