Design, fabrication and testing of microlens arrays for sensors and microsystems

Nussbaum, Philippe; Völkel, R.; Herzig, Hans-Peter; Eisner, M.; Haselbeck, S.

doi:10.1088/0963-9659/6/6/004

Design, fabrication and testing of microlens arrays for sensors and microsystems

Author(s)

Nussbaum, Philippe

Völkel, R.

Herzig, Hans-Peter

Eisner, M.

Haselbeck, S.

Date issued

1997

In

Pure and Applied Optics: Journal of the European Optical Society Part A, Institute of Physics (IOP), 1997/6/6/617-636

Abstract

We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.