Design and Fabrication of Highly Efficient Fan-Out Elements

Author(s)
Prongué, Damien
Date issued
1990
In
Japanese Journal of Applied Physics, Japan Society of Applied Physics, 1990/29/7/1307-1309
Subjects
fan-out kinoform phase grating Dammann grating CGH-HOE
Abstract
This paper reports the calculation and fabrication of periodic phase structures fan-out elements with a theoretical conversion efficiency close to 100 percent and perfect uniformity. An efficiency of 92 percent was measured for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography.
Publication type
journal article
Identifiers
https://libra.unine.ch/handle/20.500.14713/64617
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