Design, fabrication and characterization of piezoresistive pressure sensors, including the study of electrochemical etch-stop
Author(s)
Kloeck, Ben
Publisher
Neuchâtel : [s.n.]
Date issued
1989
Number of pages
149 p.
Subjects
Membrane switches--Design and construction Micromachining Pressure transducers--Design and construction ELEKTROCHEMISCHES ÄTZEN (ELEKTROCHEMISCHE TECHNIK) MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK) PIEZOELEKTRISCHE DRUCKMESSUNG (MECHANIK) Druckmessung Sensor Drucksensor Siliciumbauelement Hochschulschrift
Notes
Thèse de doctorat, Sciences, Microtechnique
Publication type
doctoral thesis
File(s)