Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications

Author(s)

Linder, Christian

Publisher

Neuchâtel : Baillod

Date issued

1993

Number of pages

106 p.

Notes

Thèse de doctorat, Sciences, Microtechnique

Publication type

doctoral thesis

Identifiers

https://libra.unine.ch/handle/20.500.14713/31233

DOI

10.35662/unine-thesis-1174

File(s)

Name

00001174.pdf

Type

Main Article

Size

1.59 MB

Format

Adobe PDF