Silicon micromachined vibrating gyroscopes with piezoresistive detection and electromagnetic excitation

Author(s)

Grétillat, Florence

Publisher

[Neuchâtel] : [s.n.]

Date issued

1998

Number of pages

139 p.

Notes

Thèse de doctorat, Sciences, Microtechnique

Publication type

doctoral thesis

Identifiers

https://libra.unine.ch/handle/20.500.14713/31122

DOI

10.35662/unine-thesis-1433

File(s)

Name

00001433.pdf

Type

Main Article

Size

1.97 MB

Format

Adobe PDF