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Micro-sized spectrometer based on a lamellar grating interferometer
Auteur(s)
Manzardo, Omar
Michaely, Roland
Schadelin, Felix
Herzig, Hans-Peter
Noell, Wilfried
Overstolz, Thomas
de Rooij, Nicolaas F.
Date de parution
2003
In
IEEE/LEOS (Lasers and Electro-Optics Society) International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers (IEEE), 2003///175-176
Résumé
A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm. A preliminary measurement with a xenon arc lamp is shown.
Identifiants
Type de publication
journal article
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