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Design and Fabrication of Highly Efficient Fan-Out Elements
Auteur(s)
Date de parution
1990
In
Japanese Journal of Applied Physics, Japan Society of Applied Physics, 1990/29/7/1307-1309
Résumé
This paper reports the calculation and fabrication of periodic phase structures fan-out elements with a theoretical conversion efficiency close to 100 percent and perfect uniformity. An efficiency of 92 percent was measured for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography.
Identifiants
Type de publication
journal article
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