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Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System
Auteur(s)
Akiyama, Terunobu
Aeschimann, Laure
Chantada, Laura
de Rooij, Nicolaas F.
Heinzelmann, Harry
Herzig, Hans-Peter
Manzardo, Omar
Meister, André
Polesel-Maris, Jérôme
Pugin, Raphaël
Staufer, Urs
Vettiger, Peter
Date de parution
2007
In
Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2007/46/9B/6458-6462
Résumé
A concept of an array actuator that is used to control the tip–sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10×10 array actuator with 500 µm <i>xy</i>-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single probe was 2.19 µm<sub>p–p</sub> at ±168 V<sub>p–p</sub>. A major issue for the actuator was the insufficient strength of the frame of the probe array chip. The demonstrated array actuator is highly compatible with previously developed parallel readout modules that use either a parallel optical beam or integrated piezoresistive deflection sensing. A large-scale 2D probe array is our ultimate target.
Identifiants
Type de publication
journal article
