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Miniaturized, focusing fan-out elements: design, fabrication and characterization
Auteur(s)
Schilling, Andreas
Nussbaum, Philippe
Ossmann, Ch.
Traut, S.
Rossi, Markus
Schift, H.
Herzig, Hans-Peter
Date de parution
1999
In
Journal of Optics A: Pure and Applied Optics, Institute of Physics (IOP), 1999/1/2/244-248
Résumé
We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green interferometer. The overall performance of the combined, hybrid elements is demonstrated with intensity distributions recorded in the focal planes.
Identifiants
Type de publication
journal article
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