Options
Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics
Auteur(s)
Noell, Wilfried
Sun, Winston
de Rooij, Nicolaas F.
Manzardo, Omar
Date de parution
2002
In
Lasers and Electro-Optics Society (LEOS). The 15th Annual Meeting of the IEEE, Institute of Electrical and Electronics Engineers (IEEE), 2002/2//580-581
Résumé
Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very insensitive to temperature changes. The particular strength of the technology is monolithic horizontal and vertical micromirrors for a variety of applications.
Identifiants
Type de publication
journal article
