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Modeling and simulation of electromechanical transducers in microsystems using an analog hardware description language
Auteur(s)
Romanowicz, Bart
Laudon, Matthew
Lerch, Philippe
Renaud, Philippe
Amann, Hans-Peter
Boegli, Alexis
Moser, Vincent
Pellandini, Fausto
Date de parution
1997-03-17
In
IEEE Proceedings of European Design and Test Conference (ED&TC), Institute of Electrical and Electronics Engineers (IEEE), 1997///119-123
Résumé
The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method. All models of transducers are written in HDL-ATM, a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.
Identifiants
Type de publication
journal article
