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High Quality Surface Passivation and Heterojunction Fabrication by VHF-PECVD Deposition of a-Si:H on c-Si Theory and Experiments
Auteur(s)
Fesquet, Luc
Olibet, Sara
Vallat-Sauvain, Evelyne
Shah, Arvind
Ballif, Christophe
Date Issued
2008
Journal
23rd European Photovoltaic Solar Energy Conference and Exhibition (EU-PVSC), WIP-Renewable Energies, 2008/2/2DV 2.14/1
Publication type
journal article
