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Dynamic behavior of the tuning fork AFM probe
Auteur(s)
Bayat, Dara
Akiyama, Terunobu
de Rooij, Nicolaas F.
Staufer, Urs
Date de parution
2008
In
Microelectronic Engineering, Elsevier, 2008/85/5-6/1018-1021
Résumé
We recently introduced a new self-actuating and self-sensing atomic force microscope (AFM) probe based on a quartz tuning fork and a micro-fabricated cantilever. This system has two degrees of freedom, associated with its two components. We developed a model for describing how the sample-tip interaction is transduced to the tuning fork. It is based on two coupled spring-mass systems. In a first step, the coupling between the tuning fork and the cantilever was investigated to reveal the influential factors. The analysis of these factors enabled us to deduce their effect on the whole system and to optimize the sensitivity of this novel probe. The theoretical analysis was compared with experimental results and it was found that the model appropriately describes the probe in a qualitative manner while further refinement will be needed for achieving a correct quantitative description.
Identifiants
Type de publication
journal article
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