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A novel low noise hydrogenated amorphous silicon pixel detector
Auteur(s)
Moraes, D.
Anelli, G.
Despeisse, M.
Dissertori, G.
Garrigos, A.
Jarron, P.
Kaplon. J.
Miazza, C.
Shah, Arvind
Viertel, G. M.
Wyrsch, Nicolas
Date de parution
2004
In
journal of n, Elsevier, 2004/338-340//729-731
Résumé
Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 μm pitch based on a n–i–p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from <sup>63</sup>Ni and <sup>90</sup>Sr sources was performed.
Identifiants
Type de publication
journal article
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