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Influence of substrate on the microstructure of microcrystalline silicon layers and cells
Auteur(s)
Bailat, Julien
Vallat-Sauvain, Evelyne
Feitknecht, Luc
Droz, Corinne
Shah, Arvind
Date de parution
2002
In
Journal of Non-Crystalline Solids, Elsevier, 2002/299-302//1219-1223
Résumé
Hydrogenated microcrystalline silicon i-layers were deposited with a fixed silane concentration on various substrates and incorporated into n–i–p solar cells. ‘Average crystallinity' and detailed microstructure of layers and devices were evaluated by X-ray diffraction (XRD) and transmission electron microscopy (TEM), respectively. The role of the substrate is thereby shown to be very critical; a change in the substrate can cause a transition from amorphous to microcrystalline growth in micrometer-thick layers. When crystalline growth occurs, the layer microstructure is depth-dependent.
Identifiants
Type de publication
journal article
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