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  4. Optimized staircase profiles for diffractive optical devices made from absorbing materials
 
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Optimized staircase profiles for diffractive optical devices made from absorbing materials

Auteur(s)
Nöhammer, Bernd
Editeur(s)
David, Christian
Gobrecht, Jens
Herzig, Hans-Peter
Date de parution
2003
In
Optics Letters, Optical Society of America, 2003/28/13/1087-1089
Mots-clés
  • diffraction theory

  • diffractive optics

  • lithography

  • ultraviolet

  • extreme

  • x-ray optics

Résumé
We report on the optimization of staircase grating profiles for the case of absorbing grating materials. Using a simple numerical algorithm, we determined the grating parameters, maximizing the first-order diffraction efficiency for different numbers of staircase steps. The results show that there is a significant difference between the staircase profiles for nonnegligible and negligible absorption. The obtained solutions are of importance for diffractive optics in the soft-x-ray and extreme-ultraviolet ranges.
URI
https://libra.unine.ch/handle/123456789/17176
Autre version
http://ol.osa.org/abstract.cfm?id=72879
Type de publication
Resource Types::text::journal::journal article
Dossier(s) à télécharger
 main article: N_hammer_Bernd_-_Optimized_staircase_profiles_for_diffractive_20080208.pdf (320.95 KB)
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