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Monolithically integrated optical displacement sensor in GaAs/AlGaAs
Auteur(s)
Editeur(s)
Zappe, H. P.
Dändliker, René
Date de parution
1995
In
Electronics Letters, Institution of Engineering and Technology (IET), 1995/31/24/2121-2122
Résumé
A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system. The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at a measurement distance of up to 45 cm, requiring only the alignment of an external GRIN lens for beam collimation.
Autre version
http://dx.doi.org/10.1049/el:19951455
Type de publication
Resource Types::text::journal::journal article
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