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Miniature lamellar grating interferometer based on silicon technology
Auteur(s)
Manzardo, Omar
Michaely, Roland
Schädelin, Felix
Noell, Wilfried
Overstolz, Thomas
de Rooij, Nicolaas F.
Herzig, Hans-Peter
Date de parution
2004
In
Optics Letters, Optical Society of America, 2004/29/13/1437-1439
Résumé
We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. For the first time to our knowledge, we measure the spectrum of an extended white-light source with a resolution of 1.6 nm at a wavelength of 400 nm and of 5.5 nm at 800 nm. The wavelength accuracy is better than 0.5 nm, and the inspected wavelength range extends from 380 to 1100 nm. The optical path difference maximum is 145 μm . The dimensions of the device are 5 mm × 5 mm.
Identifiants
Autre version
http://ol.osa.org/abstract.cfm?id=80391
Type de publication
journal article
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