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Simple technique for replication of micro-optical elements
Auteur(s)
Nussbaum, Philippe
Editeur(s)
Philipoussis, Irène
Husser, Aline
Herzig, Hans-Peter
Date de parution
1998
In
Optical Engineering, International Society for Optical Engineering (SPIE), 1998/37/6/1804-1808
Résumé
A simple technique for the replication of micro-optical elements is presented. Elastomeric material is used to realize a negative mold of the original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements, are produced. The refractive microlenses have a diameter of 970 µm and a height of 79 µm and the diffractive element is a multilevel blazed grating with a period of 64 µm. The characteristics of the replicated elements are measured using different methods. The deviation from a sphere of the original and the replicated refractive microlenses is 0.13λ and 0.12λ root mean square (rms), respectively. The replicated multilevel blazed grating has a diffraction efficiency of over 80%. An alternative method for realizing planoconcave microlenses from a planoconvex master is also presented.
Autre version
http://dx.doi.org/10.1117/1.601799
Type de publication
Resource Types::text::journal::journal article
