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Accès libre

Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics

2002, Noell, Wilfried, Sun, Winston, de Rooij, Nicolaas F., Herzig, Hans-Peter, Manzardo, Omar, Dändliker, René

Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very insensitive to temperature changes. The particular strength of the technology is monolithic horizontal and vertical micromirrors for a variety of applications.

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Accès libre

Pulsed fiber laser using micro-electro-mechanical mirrors

1999, Peter, Yves-Alain, Herzig, Hans-Peter, Rochat, Etienne, Dändliker, René, Marxer, Cornel, de Rooij, Nicolaas F.

Two different types of micromirrors are integrated with a fiber laser to modulate the cavity Q-factor. Both systems operate at frequencies up to 60 kHz and generate a pulse peak power 100 times higher than the continuous emission. We simulate the emitted pulses and find a good agreement with the measured value for the period of relaxation oscillations. The simulations also show the necessity of a shorter rise time of the Q-factor modulation to achieve one single giant and narrow Q-switched pulse.