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Herzig, Hans-Peter
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Herzig, Hans-Peter
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- PublicationAccès libreOptimized kinoform structures for highly efficient fan-out elements(1992)
;Prongué, Damien; ; Gale, M. T. - PublicationAccès libreDesign and Fabrication of Highly Efficient Fan-Out Elements(1990)
; ;Prongué, DamienThis paper reports the calculation and fabrication of periodic phase structures fan-out elements with a theoretical conversion efficiency close to 100 percent and perfect uniformity. An efficiency of 92 percent was measured for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography.