Miniaturized, focusing fan-out elements: design, fabrication and characterization

Schilling, Andreas; Nussbaum, Philippe; Ossmann, Ch.; Traut, S.; Rossi, Markus; Schift, H.; Herzig, Hans-Peter

doi:10.1088/1464-4258/1/2/025

Miniaturized, focusing fan-out elements: design, fabrication and characterization

Author(s)

Schilling, Andreas

Nussbaum, Philippe

Ossmann, Ch.

Traut, S.

Rossi, Markus

Schift, H.

Herzig, Hans-Peter

Date issued

1999

In

Journal of Optics A: Pure and Applied Optics, Institute of Physics (IOP), 1999/1/2/244-248

Subjects

focusing fan-out injection moulding reactive ion etching direct laser writing optical interconnects

Abstract

We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green interferometer. The overall performance of the combined, hybrid elements is demonstrated with intensity distributions recorded in the focal planes.