Micro-sized spectrometer based on a lamellar grating interferometer

Manzardo, Omar; Michaely, Roland; Schadelin, Felix; Herzig, Hans-Peter; Noell, Wilfried; Overstolz, Thomas; de Rooij, Nicolaas F.

doi:10.1109/OMEMS.2003.1233522

Micro-sized spectrometer based on a lamellar grating interferometer

Author(s)

Manzardo, Omar

Michaely, Roland

Schadelin, Felix

Herzig, Hans-Peter

Noell, Wilfried

Overstolz, Thomas

de Rooij, Nicolaas F.

Date issued

2003

In

IEEE/LEOS (Lasers and Electro-Optics Society) International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers (IEEE), 2003///175-176

Abstract

A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm. A preliminary measurement with a xenon arc lamp is shown.