Continuous-relief diffractive optical elements for two-dimensional array generation

Author(s)
Gale, M. T.
Rossi, Markus
Schutz, Helmut
Ehbets, Peter
Herzig, Hans-Peter
Prongué, Damien
Date issued
1993
In
Applied Optics, Optical Society of America, 1993/32/14/2526-2533
Subjects
diffractive optical elements fan-out laser-beam writing lithography replication
Later version
http://ao.osa.org/abstract.cfm?id=60072
Publication type
journal article
Identifiers
https://libra.unine.ch/handle/20.500.14713/58463
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