High Quality Surface Passivation and Heterojunction Fabrication by VHF-PECVD Deposition of a-Si:H on c-Si Theory and Experiments

Author(s)
Fesquet, Luc
Olibet, Sara
Vallat-Sauvain, Evelyne
Shah, Arvind
Ballif, Christophe
Date issued
2008
In
23rd European Photovoltaic Solar Energy Conference and Exhibition (EU-PVSC), WIP-Renewable Energies, 2008/2/2DV 2.14/1
Publication type
journal article
Identifiers
https://libra.unine.ch/handle/20.500.14713/58357
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Fesquet_Luc_-_High_quality_surface_passivation_20080617.pdf

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