Theoretical and experimental investigations on silicon single crystal resonant structures

Author(s)

Buser, Rudolf A.

Publisher

Neuchâtel : [s.n.]

Date issued

1989

Number of pages

234 p.

Notes

Thèse de doctorat, Sciences, Microtechnique

Publication type

doctoral thesis

Identifiers

https://libra.unine.ch/handle/20.500.14713/32662

DOI

10.35662/unine-thesis-1061

File(s)

Name

00001061.pdf

Type

Main Article

Size

2.93 MB

Format

Adobe PDF