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  4. Thin film coated submicron gratings : theory, design, fabrication and application

Thin film coated submicron gratings : theory, design, fabrication and application

Author(s)
Heine, Claus
Publisher
Neuchâtel : [s.n.]
Date issued
1996
Number of pages
77 p.
Notes
Thèse de doctorat, Sciences, Microtechnique
Publication type
doctoral thesis
Identifiers
https://libra.unine.ch/handle/20.500.14713/31289
DOI
10.35662/unine-thesis-1345
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00001345.pdf

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