Microcrystalline silicon ([mu]c-Si:H) prepared with very high frequency glow discharge (VHF-GD) process

Author(s)

Prasad, Kshem

Publisher

[Neuchâtel] : [s.n.]

Date issued

1991

Number of pages

108 p.

Notes

Thèse de doctorat, Sciences, Microtechnique

Publication type

doctoral thesis

Identifiers

https://libra.unine.ch/handle/20.500.14713/31243

DOI

10.35662/unine-thesis-1125

File(s)

Name

00001125.pdf

Type

Main Article

Size

1.77 MB

Format

Adobe PDF