Simulation, design and characterization of a silicon piezoresistive accelerometer, fabricated by a bipolar-compatible industrial process

Author(s)

Thomas Tschan

Publisher

Neuchâtel : [s.n.]

Date issued

1992

Number of pages

140 p.

Subjects

BESCHLEUNIGUNGSMESSUNG + BESCHLEUNIGUNGSMESSER (MECHANIK) Hochschulschrift

Notes

Thèse de doctorat, Sciences, Microtechnique

Publication type

doctoral thesis

Identifiers

DOI

File(s)

Name

00001138.pdf

Type

Main Article

Size

2.25 MB

Format

Adobe PDF