Surface micromachined electrostatic actuators

Author(s)
Jaecklin, Victor P.
Publisher
Neuchâtel : Moser
Date issued
1994
Number of pages
131 p.
Subjects
ELEKTROSTATIK/TECHNISCHE ANWENDUNG (ELEKTROTECHNIK) MIKROMECHANIK (MASCHINENBAU) STELLANTRIEBE + STELLEINRICHTUNGEN (AUTOMATISCHE REGELUNG) Hochschulschrift
Notes
Thèse de doctorat, Sciences, Microtechnique
Publication type
doctoral thesis
Identifiers
https://libra.unine.ch/handle/20.500.14713/31163
DOI
10.35662/unine-thesis-1203
File(s)
Loading...
Thumbnail Image
Download
Name

00001203.pdf

Type

Main Article

Size

2.25 MB

Format

Adobe PDF