Interferometric fabrication of modulated submicrometer gratings in photoresist

Author(s)

Ehbets, Peter

Nussbaum, Philippe

Blattner, Peter

Date issued

1995

In

Applied Optics, Optical Society of America, 1995/34/14/2540-2547

Subjects

holography photoresist submicrometer gratings diffractive optical elements optical interconnects

Later version

http://ao.osa.org/abstract.cfm?id=45389

Publication type

journal article

Identifiers

File(s)

Name

Ehbets_Peter_-_Interferometric_fabrication_of_modulated_submicrometer_20080213.pdf

Type

Main Article

Size

8.03 MB

Format

Adobe PDF