Monolithically integrated optical displacement sensor in GaAs/AlGaAs

Hofstetter, Daniel; Zappe, H. P.; Dändliker, René

doi:10.1049/el:19951455

Monolithically integrated optical displacement sensor in GaAs/AlGaAs

Author(s)

Hofstetter, Daniel

Laboratoire temps-fréquence

Zappe, H. P.

Dändliker, René

Labo d'optique appliquée

Date issued

1995

In

Electronics Letters, Institution of Engineering and Technology (IET), 1995/31/24/2121-2122

Subjects

displacement measurement optical sensors integrated optoelectronics

Abstract

A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system. The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at a measurement distance of up to 45 cm, requiring only the alignment of an external GRIN lens for beam collimation.