Multi-axial silicon bulk-micromachined accelerometers with capacitive or optical read-out

Author(s)

Schröpfer, Gerold

Publisher

[S.l.] : [s.n.]

Date issued

1998

Number of pages

178 p.

Notes

Thèse de doctorat, Sciences, Physique

Publication type

doctoral thesis

Identifiers

https://libra.unine.ch/handle/20.500.14713/31103

DOI

10.35662/unine-thesis-1440

File(s)

Name

00001440.pdf

Type

Main Article

Size

3.51 MB

Format

Adobe PDF