Miniaturized time-scanning Fourier transform spectrometer based on silicon technology

We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of ±0.5 <i>μ</i>m for a displacement of 38.5 <i>μ</i>m . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is ±25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm.