Integrated and hybrid electrostatic rotary micromotors based on silicon technology

Author(s)

Paratte, Lionel

Publisher

Neuchâtel : [s.n.]

Date issued

1996

Number of pages

129 p.

Notes

Thèse de doctorat, Sciences, Microtechnique

Publication type

doctoral thesis

Identifiers

https://libra.unine.ch/handle/20.500.14713/31153

DOI

10.35662/unine-thesis-1323

File(s)

Name

00001323.pdf

Type

Main Article

Size

2.34 MB

Format

Adobe PDF