High-rate deposition of hydrogenated amorphous silicon by the VHF-GD method

Author(s)

Curtins, H.

Favre, M.

Wyrsch, Nicolas

Brechet M.

Prasad K.

Shah, Arvind

Date issued

1987

In

Proceedings of the 19th IEEE Photovoltaic Specialists Conference, Institute of Electrical and Electronics Engineers (IEEE), 1987///695-698

Publication type

journal article

Identifiers

File(s)

Name

Curtins_H._-_High-rate_depositions_of_hydrogenated_20080918.pdf

Type

Main Article

Size

392.86 KB

Format

Adobe PDF