Thin-film silicon detectors for particle detection

Integrated particle sensors have been developed using thin-film on ASIC technology. For this purpose, hydrogenated amorphous silicon diodes, in various configurations, have been optimized for particle detection. These devices were first deposited on glass substrates to optimize the material properties and the dark current of very thick diodes (with thickness up to 50 μm). Corresponding diodes were later directly deposited on CMOS readout chips. These integrated particle sensors have been characterized using light pulse illumination and beta particle irradiation from ⁶³Ni and ⁹⁰Sr sources. Direct detection of single low- and high-energy beta particles have been demonstrated. The application of this new integrated particle sensor concept for medical imaging is also discussed.