Micro-optical elements with arbitrary surfaces

Author(s)
Schilling, Andreas
Nussbaum, Philippe
Philipoussis, Irene
Herzig, Hans-Peter
Rossi, Markus
Kley, Ernst-Bernhard
Date issued
2000
In
Diffractive Optics and Micro-Optics (DOMO), Optical Society of America, 2000///234-236
Subjects
micro-optics diffractive optics microstructure fabrication
Abstract
We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography incombination with reactive ion etching, and graytone lithography.
Later version
http://www.opticsinfobase.org/abstract.cfm?URI=DOMO-2000-DWA3
Publication type
journal article
Identifiers
https://libra.unine.ch/handle/20.500.14713/58405
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