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Optical testing of fine grating structures
Auteur(s)
Blattner, Peter
Herzig, Hans-Peter
Date de parution
1996
In
Optical Inspection and Micromeasurements (Proceedings of SPIE), International Society for Optical Engineering (SPIE), 1996/2782/6/628-634
Résumé
The ability to measure the relief parameters and the absolute position accuracy of micrometer-sized structures is of obvious importance, not only to determine if the desired structure has been realized, but also to optimize the fabrication process. In this paper a simple characterization method is presented allowing fast and non-destructive testing of phase and amplitude gratings over large areas. Local line width and position errors can be detected. The theoretical modeling is based on rigorous diffraction theory.
Identifiants
Type de publication
journal article
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